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ISO 18516:2019 Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres >
ISO 18516:2019 Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres, 2019
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Symbols and abbreviated terms
- 5 General information
- 5.1 Background
- 5.2 Survey on principal methods to characterize lateral resolution in imaging surface chemical analysis
- 5.3 Measurement of lateral resolution in imaging surface chemical analysis
- 5.4 Dependence of lateral resolution on scan direction
- 5.5 Reporting results
- 6 Measurement of lateral resolution using the straight edge method
- 6.1 Introduction
- 6.2 Model functions and sharpness parameters
- 6.3 Requirements for a test sample
- 6.4 Cleaning the straight-edge specimen
- 6.5 Mounting the straight-edge specimen
- 6.6 Operating the instrument
- 6.7 Data acquisition requirements
- 6.8 Determination of D12−88
- 6.9 Determination of line spread function
- 6.10 Reporting
- 7 Measurement of lateral resolution using the narrow line method
- 7.1 Introduction
- 7.2 Requirements for a test sample
- 7.3 Cleaning the narrow stripe specimen
- 7.4 Mounting the narrow stripe specimen
- 7.5 Operating the instrument
- 7.6 Data acquisition requirements
- 7.7 Determination of wLSF
- 7.8 Reporting
- 8 Measurement of lateral resolution using the grating method
- 8.1 Introduction
- 8.2 Requirements for a test sample
- 8.3 Cleaning the grating specimen
- 8.4 Mounting the grating specimen
- 8.5 Operating the instrument
- 8.6 Data acquisition
- 8.7 Estimation of effective lateral resolution re by visual inspection of an image or a line scan
- 8.8 Determination of effective lateral resolution re by numerical analysis of a line profile
- 8.8.1 General
- 8.8.2 Consideration of noise and determination of reduced noise σNr
- 8.8.3 Determination of dip D
- 8.8.4 Resolution criterion
- 8.9 Determination of the effective lateral resolution re using graded gratings
- 8.9.1 Estimation of effective lateral resolution re by using the resolution criterion in Formula (17)
- 8.9.2 Determination of effective lateral resolution re by using Formula (17) and an interpolation–extrapolation method
- 8.10 Reporting
- Annex A (informative) The relation between sharpness parameters and effective lateral resolution
- Annex B (informative) Straight edge method: systematic underestimation of D12−88 caused by insufficient plateau length Lpl
- Annex C (informative) Straight edge method: required length ranges for LESF
- Annex D (informative) Straight edge method: the uncertainty of D12−88
- Annex E (informative) Narrow stripe method: systematic overestimation of wLSF caused by inappropriately large widths ws of the imaged stripe
- Annex F (informative) Narrow line method: the uncertainty of wLSF
- Annex G (informative) Imaging of square gratings: reduction of image period for three-stripe gratings
- Annex H (informative) Imaging of square gratings: relation between signal-to-noise ratio and effective lateral resolution
- Annex I (informative) Imaging of square gratings: minimum number of sampling points per period
- Annex J (informative) Imaging of square gratings: uncertainty of re determined by visual inspection of an image or line scan over a series of gratings
- Annex K (informative) Imaging of square gratings: Uncertainty of re determined by interpolation–extrapolation
- Annex L (informative) Determination of lateral resolution by imaging of square wave gratings — practical example for SIMS
- Bibliography [Go to Page]