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ISO 13083:2015 Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes >
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ISO 13083:2015 Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes, 2015
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Symbols and abbreviated terms
- 5 General information
- 5.1 Background information
- 5.2 Target
- 5.2.1 Scanning capacitance microscope
- 5.2.2 Scanning spreading resistance microscope
- 5.3 Measurement method for lateral resolution in SCM and SSRM
- 5.4 Key parameters in determining the lateral resolution
- 6 Measurement of lateral resolution of SCM with the sharp-edge method
- 6.1 Background information
- 6.2 Selection of the sample
- 6.3 Setting the parameters before the operation of the instrument
- 6.4 Data collection
- 6.5 Data analysis
- 6.5.1 Obtaining the resolution
- 6.5.2 Random contributions to the resolution value
- 6.6 Recording of the parameters
- 7 Measurement of lateral resolution of SSRM with the sharp-edge method
- 7.1 Background information
- 7.2 Selection of the sample
- 7.3 Setting the parameters before the operation of the instrument
- 7.4 Data collection
- 7.5 Data analysis
- 7.5.1 Obtaining the resolution
- 7.5.2 Random contributions to the resolution value
- 7.6 Recording of the parameters
- Annex A (informative) An example of the measurement of SCM resolution
- Annex B (informative) An example of the measurement of SSRM resolution
- Bibliography [Go to Page]